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Effects of liquid viscosity and density on resonant behavior of nano-mechanical PZT (52/48) thin film cantilever

Authors

Hwang Kyo Seon; Yoon, Dae Sung; Ki Hyun Yoon; Kim, Tae Song; Lee, Jeong Hoon

Citation

ISIF 2004

Keywords

resonance frequency; PZT; thin film; cantilever; biosensor

URI

https://pubs.kist.re.kr/handle/201004/105445

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KIST Conference Paper > Others

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