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Etch stop Process of SrBi2Ta2O9 thin film using CeO2 buffer layer for self aligned ferroelectric gate structure

Authors

Kwon Young Suk; SHIN, SUN IL; KIM IK SOO; Kim, Seong Il; Kim, Yong Tae; In-Hoon Choi

Citation

The 12th Seoul International Symposium on the Physics of Semiconductors and Applications-2004, pp.174

URI

https://pubs.kist.re.kr/handle/201004/105558

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