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Development of Etch Stop Process by Using Selective Dry Etching of SrBi2Ta2O9/Y2O3

Authors

SHIN, SUN IL; Kwon Young Suk; Kim, Seong Il; Kim, Yong Tae; Jung Ho Park

Citation

The 11th Korean Conference on Semiconductors, v.2, pp.449 - 450

URI

https://pubs.kist.re.kr/handle/201004/105566

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KIST Conference Paper > Others

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