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Study on the proton implantation process for the fabrication of SOI wafer

Other Titles

SOI웨이퍼 제조를 위한 양성자주입공정 연구

Authors

우형주; 최한우; 김준곤; 홍완; 김기동; Byun, Young Tae

Citation

2003 KAPRA & KPS/DPP Joint Workshop, pp.38 - 41

Keywords

SOI 웨이퍼; 양성자 주입; Ion-cut; ERD; SIMS; 열처리

URI

https://pubs.kist.re.kr/handle/201004/105924

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KIST Conference Paper > Others

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