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Thermal treatment of InGaAs/GaAs self-assembled quantum dots with PECVD-grown SiO₂ capping layer

Authors

S. H. Hwang; Shin, Jae Cheol; Choi, Won Jun; Y. M. Park; SONG, JIN-DONG; Park, Young Ju; Han, Il Ki; Cho, Woon Jo; Lee, Jung Il; J. W. Choe

Citation

2003 IEEE International Conference on Plasma Science, pp.427

Keywords

quantum dot; dielectric capping; thermal treatment

URI

https://pubs.kist.re.kr/handle/201004/105927

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KIST Conference Paper > Others

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