KIST Library Institutional Repository

Nanostructures of SiNx and Si formed by exposure of ionized gas

Authors

정민철; 이태경; Park, Young Ju; 고창훈; 전승호; 함철영; 한문섭; 박경완

Citation

The 10th Korean Conference on Semiconductors, pp.121 - 122

Keywords

nanostructure; quantum confinement effect; TEM; XPS; surface modification

URI

https://pubs.kist.re.kr/handle/201004/105942

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML