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Experimental study on SOI fabrication using Smart-cut technology

Other Titles

Smart-cut 기술을 이용한 SOI 제작에 관한 실험적 고찰

Authors

Hyoung Kwon Kim; Byun, Young Tae; Kim, Sun Ho; Sang Kook Han

Citation

Photonics Conference 2003, pp.185 - 186

Keywords

SOI; Smart-cut; 이온주입; 열산화막; CMP연마

URI

https://pubs.kist.re.kr/handle/201004/105950

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KIST Conference Paper > Others

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