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Localized bond states and quantum size effect in SiNχ p-Si(100) thin films deposited by rf-reactive sputtering method

Authors

Tae-Gyoung Lee; Park Young Ju; Eun-Kyu Kim

Citation

The 11th Seoul International Symposium on the physics of Semiconductors and Applications-2002, pp.319

URI

https://pubs.kist.re.kr/handle/201004/106722

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