Localized bond states and quantum size effect in SiNχ p-Si(100) thin films deposited by rf-reactive sputtering method

Authors
Tae-Gyoung LeePark Young JuEun-Kyu Kim
Citation
The 11th Seoul International Symposium on the physics of Semiconductors and Applications-2002, pp.319
URI
https://pubs.kist.re.kr/handle/201004/106722
Appears in Collections:
KIST Conference Paper > Others
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