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Crystal structure and electrical properties Pt/SrBi2Nb2O9/ZrO2/Si ferroelectric gate structure

Authors

최훈상; 임건식; 이종한; Kim Yong Tae; Kim Seong Il; 최인훈

Citation

11th Seoul International Symposium on Physics of Semiconductors and Applications 2002 (ISPSA 2002), pp.331 - 332

Keywords

결정구조; SBN/ZrO2 강유전체게이트 구조; 전기적특성; interdiffusion

URI

https://pubs.kist.re.kr/handle/201004/106735

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KIST Conference Paper > Others

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