DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author최훈상-
dc.contributor.author이종한-
dc.contributor.author임건식-
dc.contributor.author강민정-
dc.contributor.author최인훈-
dc.contributor.authorKim Yong Tae-
dc.contributor.authorKim Seong Il-
dc.date.accessioned2024-01-13T12:30:58Z-
dc.date.available2024-01-13T12:30:58Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106751-
dc.languageEnglish-
dc.subject기판전극-
dc.subjectMFM구조-
dc.subject강유전체-
dc.subjectSBT박막-
dc.subject잔류분극-
dc.titleThe effects of various bottom electrodes in MFM structure on the ferroelectric properties of SrBi2Nb2O9 thin films using RF magnetron sputtering-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationJoint International Plasma Symposium of 6th APCPST, 15th SPSM, OS 2002 & 11th KAPRA, pp.427-
dc.citation.titleJoint International Plasma Symposium of 6th APCPST, 15th SPSM, OS 2002 & 11th KAPRA-
dc.citation.startPage427-
dc.citation.endPage427-
dc.citation.conferencePlaceKO-
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