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The effects of various bottom electrodes in MFM structure on the ferroelectric properties of SrBi2Nb2O9 thin films using RF magnetron sputtering

Authors

최훈상; 이종한; 임건식; 강민정; 최인훈; Kim Yong Tae; Kim Seong Il

Citation

Joint International Plasma Symposium of 6th APCPST, 15th SPSM, OS 2002 & 11th KAPRA, pp.427

Keywords

기판전극; MFM구조; 강유전체; SBT박막; 잔류분극

URI

https://pubs.kist.re.kr/handle/201004/106751

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KIST Conference Paper > Others

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