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dc.contributor.authorJONG-YEON PARK-
dc.contributor.authorKun-Tae Kim-
dc.contributor.author이준섭-
dc.contributor.authorLEE TAE HUN-
dc.contributor.authorKwon Gwang Min-
dc.contributor.authorShin Hyun Joon-
dc.contributor.authorMoon Sung Wook-
dc.contributor.authorPARK JEONG HO-
dc.date.accessioned2024-01-13T12:31:31Z-
dc.date.available2024-01-13T12:31:31Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106786-
dc.languageEnglish-
dc.subjectMRPBI system-
dc.subjectUV-lithography-
dc.subjectIR sensor-
dc.subject3D MEMS antenna-
dc.titleFabrication of 3D MEMS antenna array structure for uncooled IR sensor using MRPBI system and plastic micromachining-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationProceedings of ICEE, pp.1444 - 1448-
dc.citation.titleProceedings of ICEE-
dc.citation.startPage1444-
dc.citation.endPage1448-
dc.citation.conferencePlaceKO-
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