DSpace at KISTKIST Conference PaperOthers

Full metadata record

DC Field Value Language
dc.contributor.author김종용-
dc.contributor.author채경수-
dc.contributor.author정대석-
dc.contributor.author김태엽-
dc.contributor.authorMoon Sung Wook-
dc.contributor.author이종철-
dc.date.accessioned2024-01-13T12:34:22Z-
dc.date.available2024-01-13T12:34:22Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106966-
dc.languageEnglish-
dc.subjectMEMS-
dc.subjectUV-LIGA-
dc.subjectnickel-
dc.subjectoptical switch-
dc.titleFabrication of high-aspect-ratio in-plane actuator using UV-LIGA process-
dc.title.alternativeUV-LIGA 공정을 이용한 고형상비 In-plan 구동기의 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제4회 한국 MEMS 학술대회 초록집 = The 4th Korean MEMS Conference, pp.58 - 62-
dc.citation.title제4회 한국 MEMS 학술대회 초록집 = The 4th Korean MEMS Conference-
dc.citation.startPage58-
dc.citation.endPage62-
dc.citation.conferencePlaceKO-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE