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dc.contributor.authorKIM IN TAY-
dc.contributor.author박윤권-
dc.contributor.author이시형-
dc.contributor.authorLEE YUN HI-
dc.contributor.authorLee Jeon Kook-
dc.contributor.author김남수-
dc.contributor.authorJu Byeong Kwon-
dc.date.accessioned2024-01-13T12:34:26Z-
dc.date.available2024-01-13T12:34:26Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106970-
dc.languageEnglish-
dc.subjectFBAR-
dc.subjectpiezoelectric-
dc.subjectSOI-
dc.subjectMMIC-
dc.subjectmembrane-
dc.titleMonolithic film bulk acoustic wave resonator using SOI wafer-
dc.title.alternativeSOI 웨이퍼를 이용한 압전박막 공진기의 설계 및 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제 4 회 한국 MEMS 학술대회 초록집, pp.250 - 254-
dc.citation.title제 4 회 한국 MEMS 학술대회 초록집-
dc.citation.startPage250-
dc.citation.endPage254-
dc.citation.conferencePlaceKO-
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