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Monolithic film bulk acoustic wave resonator using SOI wafer

Other Titles

SOI 웨이퍼를 이용한 압전박막 공진기의 설계 및 제작

Authors

KIM IN TAY; 박윤권; 이시형; LEE YUN HI; Lee Jeon Kook; 김남수; Ju Byeong Kwon

Citation

제 4 회 한국 MEMS 학술대회 초록집, pp.250 - 254

Keywords

FBAR; piezoelectric; SOI; MMIC; membrane

URI

https://pubs.kist.re.kr/handle/201004/106970

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KIST Conference Paper > Others

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