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dc.contributor.authorJONG-YEON PARK-
dc.contributor.authorKuntae Kim-
dc.contributor.authorKIM JINSEOK-
dc.contributor.author한용희-
dc.contributor.authorMoon Sung Wook-
dc.contributor.authorPARK JEONG HO-
dc.date.accessioned2024-01-13T13:02:18Z-
dc.date.available2024-01-13T13:02:18Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/107102-
dc.languageEnglish-
dc.subjectMRPBI-
dc.titleHARS(high aspect ratio structure) fabrication for 3D MEMS antenna array using novel photolithography apparatus-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국반도체학술대회 논문집, pp.715 - 716-
dc.citation.title한국반도체학술대회 논문집-
dc.citation.startPage715-
dc.citation.endPage716-
dc.citation.conferencePlaceKO-
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