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HARS(high aspect ratio structure) fabrication for 3D MEMS antenna array using novel photolithography apparatus

Authors

JONG-YEON PARK; Kuntae Kim; KIM JINSEOK; 한용희; Moon Sung Wook; PARK JEONG HO

Citation

한국반도체학술대회 논문집, pp.715 - 716

Keywords

MRPBI

URI

https://pubs.kist.re.kr/handle/201004/107102

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KIST Conference Paper > Others

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