Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 임근식 | - |
dc.contributor.author | 최훈상 | - |
dc.contributor.author | 이종한 | - |
dc.contributor.author | Kim Yong Tae | - |
dc.contributor.author | Kim Seong Il | - |
dc.contributor.author | 최인훈 | - |
dc.date.accessioned | 2024-01-13T13:03:10Z | - |
dc.date.available | 2024-01-13T13:03:10Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/107157 | - |
dc.language | English | - |
dc.title | Structural and electrical characteristics of ZrO ₂ as a gate dielectric and buffer layer grown by RF magnetron sputtering | - |
dc.type | Conference | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | AVS 49th International Symposium, Colorado Convention Center Denver | - |
dc.citation.title | AVS 49th International Symposium, Colorado Convention Center Denver | - |
dc.citation.conferencePlace | US | - |
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