Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 임건자 | - |
| dc.contributor.author | 김태은 | - |
| dc.contributor.author | Kim Joosun | - |
| dc.contributor.author | Lee Jong Ho | - |
| dc.contributor.author | Lee Hae-Weon | - |
| dc.date.accessioned | 2024-01-13T13:31:20Z | - |
| dc.date.available | 2024-01-13T13:31:20Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/107308 | - |
| dc.language | English | - |
| dc.subject | nano-crystalline CeO ₂ | - |
| dc.title | Development of ceria-based slurry with high selectivity for STI CMP | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | Asia International Conference on Tribology 2002 | - |
| dc.citation.title | Asia International Conference on Tribology 2002 | - |
| dc.citation.conferencePlace | KO | - |
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