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Development of ceria-based slurry with high selectivity for STI CMP

Authors

임건자; 김태은; Kim Joosun; Lee Jong Ho; Lee Hae-Weon

Citation

Asia International Conference on Tribology 2002

Keywords

nano-crystalline CeO ₂

URI

https://pubs.kist.re.kr/handle/201004/107308

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KIST Conference Paper > Others

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