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dc.contributor.authorJu Byeong Kwon-
dc.contributor.author하주환-
dc.contributor.author서상원-
dc.contributor.author최승우-
dc.contributor.author최우범-
dc.date.accessioned2024-01-13T13:34:10Z-
dc.date.available2024-01-13T13:34:10Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/107488-
dc.languageEnglish-
dc.subjectSOI-
dc.titleFabrication of MEMS devices using SOI(silicon-on-insulator)-micromachining technology-
dc.title.alternativeSOI(silicon-on-insulator)-micromachining 기술을 이용한 MEMS 소자의 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation전기전자재료학회 하계학술대회, pp.874 - 877-
dc.citation.title전기전자재료학회 하계학술대회-
dc.citation.startPage874-
dc.citation.endPage877-
dc.citation.conferencePlaceKO-
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