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Fabrication of MEMS devices using SOI(silicon-on-insulator)-micromachining technology

Other Titles

SOI(silicon-on-insulator)-micromachining 기술을 이용한 MEMS 소자의 제작

Authors

Ju Byeong Kwon; 하주환; 서상원; 최승우; 최우범

Citation

전기전자재료학회 하계학술대회, pp.874 - 877

Keywords

SOI

URI

https://pubs.kist.re.kr/handle/201004/107488

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KIST Conference Paper > Others

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