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스퍼터링 증착 조건에 따른 Cr 박막의 건식식각 특성 평가 및 응용

Authors

Kim Hun; 박종원; 이주원; LEE YUN HI; 장진; Ju Byeong Kwon

Issue Date

2001-04

Citation

물리학회 춘계학술발표회, pp.206

Keywords

sputtering

URI

https://pubs.kist.re.kr/handle/201004/107824

Appears in Collections:

KIST Conference Paper > Others

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