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Lifetime control by low energy electron irradiation and hydrogen annealing

Authors

이승호; KIM HEO JEN; Seong Il Kim; 조중열; Y. Nishihara; Park Young Ju

Citation

the 8th Kor. Conf. on Semicon., pp.543 - 544

Keywords

hydrogenation; defect

URI

https://pubs.kist.re.kr/handle/201004/107876

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KIST Conference Paper > Others

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