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Optimization of PIR (pyroelectric IR) sensor with Si MEMS process

Authors

양정승; 김승현; 박동현; Kim Tae Song; 윤의준

Citation

Proceedings of the International Sensor Conference 2001, pp.153 - 158

Keywords

PZT

URI

https://pubs.kist.re.kr/handle/201004/108025

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KIST Conference Paper > Others

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