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dc.contributor.authorKIM IN TAY-
dc.contributor.author김희영-
dc.contributor.author이시형-
dc.contributor.author이성준-
dc.contributor.author김형동-
dc.contributor.authorLee Jeon Kook-
dc.contributor.author김남수-
dc.contributor.authorJu Byeong Kwon-
dc.date.accessioned2024-01-13T15:02:27Z-
dc.date.available2024-01-13T15:02:27Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108158-
dc.languageEnglish-
dc.subjectthin-film bulk acoustic wave resonator-
dc.subjectRF design-
dc.subjectRF sputtering-
dc.subjectAlN-
dc.titleDesign and fabrication of thin-film bulk acoustic resonator-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationProceeding of International Sensor Conference 2001, pp.261 - 262-
dc.citation.titleProceeding of International Sensor Conference 2001-
dc.citation.startPage261-
dc.citation.endPage262-
dc.citation.conferencePlaceKO-
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