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Design and fabrication of thin-film bulk acoustic resonator

Authors

KIM IN TAY; 김희영; 이시형; 이성준; 김형동; Lee Jeon Kook; 김남수; Ju Byeong Kwon

Citation

Proceeding of International Sensor Conference 2001, pp.261 - 262

Keywords

thin-film bulk acoustic wave resonator; RF design; RF sputtering; AlN

URI

https://pubs.kist.re.kr/handle/201004/108158

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KIST Conference Paper > Others

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