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Single precursor MOCVD of AlN thin films & the stoichiometry controlling

Other Titles

단일전구체 MOCVD 방법을 통한 AlN 박막증착과 그 조성제어

Authors

안창규; 경제홍; CHO SEONG HOON; HAN SUNG HAN; 최승철; Je-Hong Kyoung

Citation

2000 년도 한국재료학회 춘계 학술발표강연 및 논문개요집, pp.97

Keywords

MOCVD; single precursor; AlN

URI

https://pubs.kist.re.kr/handle/201004/108451

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KIST Conference Paper > Others

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