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dc.contributor.authorJu Byeong Kwon-
dc.contributor.author박흥우-
dc.contributor.author이덕중-
dc.contributor.authorPARK JEONG HO-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T16:00:29Z-
dc.date.available2024-01-13T16:00:29Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108587-
dc.subjectMEMS-
dc.title.alternative마이크로 터널링 센서의 제작 및 특성 평가 ( Ⅱ )-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제 2 회 MEMS 학술대회, pp.145 - 153-
dc.citation.title제 2 회 MEMS 학술대회-
dc.citation.startPage145-
dc.citation.endPage153-
dc.citation.conferencePlaceKO-
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