마이크로 터널링 센서의 제작 및 특성 평가 ( Ⅱ )

Authors
Ju Byeong Kwon박흥우이덕중PARK JEONG HOOH MYUNG HWAN
Issue Date
2000-04
Citation
제 2 회 MEMS 학술대회, pp.145 - 153
Keywords
MEMS
URI
https://pubs.kist.re.kr/handle/201004/108587
Appears in Collections:
KIST Conference Paper > Others
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