KIST Library Institutional Repository

Design and fabrication of a micro switch for logic devices

Other Titles

논리 소자용 초소형 스위치의 설계 및 제작

Authors

채경수; 한승오; 하종민; PARK JEONG HO; Moon Sung Wook

Citation

2000년도 MEMS 학술대회 논문집 = THe 2nd Korean Mems Conference, v.2, pp.269 - 275

Keywords

mechanical switch; MEMS; logic device; electrostatic actuator; threshold voltage

URI

https://pubs.kist.re.kr/handle/201004/108593

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML