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MOCVD deposition of AlN thin film for packaging materials

Authors

안창규; 최승철; CHO SEONG HOON; HAN SUNG HAN; 경제홍

Citation

마이크로전자 및 패키징학회지, v.7, no.1, pp.13

Keywords

MOCVD; AlN; single precusor

URI

https://pubs.kist.re.kr/handle/201004/108602

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KIST Conference Paper > Others

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