기판 접합 공정 및 마이크로 패키징 응용

Authors
Ju Byeong Kwon
Issue Date
2000-03
Citation
한국센서학회 서울 / 경인지부 창립총회, pp.?
Keywords
MEMS
URI
https://pubs.kist.re.kr/handle/201004/108618
Appears in Collections:
KIST Conference Paper > Others
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