DSpace at KIST: The fabrication of the suspended thin film resonator(STFR) using AlN piezoelectric

Full metadata record

DC Field	Value	Language
dc.contributor.author	김현호	-
dc.contributor.author	이시형	-
dc.contributor.author	Lee Jeon Kook	-
dc.contributor.author	OH MYUNG HWAN	-
dc.contributor.author	KIM SOO WON	-
dc.contributor.author	Ju Byeong Kwon	-
dc.date.accessioned	2024-01-13T16:02:54Z	-
dc.date.available	2024-01-13T16:02:54Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/108737	-
dc.language	English	-
dc.subject	aluminum nitride (AlN)	-
dc.title	The fabrication of the suspended thin film resonator(STFR) using AlN piezoelectric	-
dc.title.alternative	AlN 압전체를 이용한 suspended 압전박막공진기의 제조	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	센서학회 종합학술대회 = Sensors Conference 2000, pp.13 - 16	-
dc.citation.title	센서학회 종합학술대회 = Sensors Conference 2000	-
dc.citation.startPage	13	-
dc.citation.endPage	16	-
dc.citation.conferencePlace	KO	-

Show Simple Item Record

KIST Library Institutional Repository