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The fabrication of the suspended thin film resonator(STFR) using AlN piezoelectric

Other Titles

AlN 압전체를 이용한 suspended 압전박막공진기의 제조

Authors

김현호; 이시형; Lee Jeon Kook; OH MYUNG HWAN; KIM SOO WON; Ju Byeong Kwon

Citation

센서학회 종합학술대회 = Sensors Conference 2000, pp.13 - 16

Keywords

aluminum nitride (AlN)

URI

https://pubs.kist.re.kr/handle/201004/108737

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KIST Conference Paper > Others

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