KIST Library Institutional Repository

Improvement in the characteristics of ammonia plasma treated MSQ(Methyl Silsesquioxane)

Authors

심현상; 김동준; KIM CHUN KEUN; Kim Seong Il; Kim Yong Tae; 전형탁

Citation

Bulletin of the Korean Physical Society 2000. 10.

Keywords

MSQ; ammonia plasma treatment

URI

https://pubs.kist.re.kr/handle/201004/108824

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML