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dc.contributor.author박흥우-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.author박윤권-
dc.contributor.author김철주-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T16:34:28Z-
dc.date.available2024-01-13T16:34:28Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109100-
dc.languageEnglish-
dc.subjectFED-
dc.subjectFEA-
dc.subjectMEMS-
dc.titleMicro-tunneling sensors for vacuum level evaluation of field emission display devices-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationIVMC '99, pp.340 - 341-
dc.citation.titleIVMC '99-
dc.citation.startPage340-
dc.citation.endPage341-
dc.citation.conferencePlaceGW-
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KIST Conference Paper > Others
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