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The influence of gate insulator etching on the characteristics of Mo-tip field-emitter arrays

Authors

H. Kim; Ju Byeong Kwon; S. Lee; LEE YUN HI; OH MYUNG HWAN; 고영욱; J. Jang

Citation

SID 99 Digest, pp.930 - 933

Keywords

FED; FEA; MEMS

ISSN

0099-0966

URI

https://pubs.kist.re.kr/handle/201004/109214

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KIST Conference Paper > Others

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