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dc.contributor.author현찬경-
dc.contributor.author최승철-
dc.contributor.author황성우-
dc.contributor.authorKIM YOUN-
dc.contributor.authorKIM EUN KYU-
dc.date.accessioned2024-01-13T17:30:58Z-
dc.date.available2024-01-13T17:30:58Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109419-
dc.languageEnglish-
dc.subjectnanometer-
dc.titleNanometer scale patterning by cantilever-oscillating Atomic Force Microscope (AFM)-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제 6 회 한국반도체학술대회 논문집, pp.47 - 48-
dc.citation.title제 6 회 한국반도체학술대회 논문집-
dc.citation.startPage47-
dc.citation.endPage48-
dc.citation.conferencePlaceKO-
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