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Nanometer scale patterning by cantilever-oscillating Atomic Force Microscope (AFM)

Authors

현찬경; 최승철; 황성우; KIM YOUN; KIM EUN KYU

Citation

제 6 회 한국반도체학술대회 논문집, pp.47 - 48

Keywords

nanometer

URI

https://pubs.kist.re.kr/handle/201004/109419

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KIST Conference Paper > Others

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