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Thermodynamic study of stress distribution in epitaxial Pb(Zr,Ti)O3 thin films

Authors

KIM HYUNG JOON; 오성훈; 장현명

Citation

MRS fall meeting, pp.?

Keywords

thin film; PZT; Stress; Thermodynamic

URI

https://pubs.kist.re.kr/handle/201004/109444

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KIST Conference Paper > Others

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