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Fabrication of microbolometer using MEMS technology

Other Titles

MEMS 기술을 이용한 마이크로 볼로미터의 제작

Authors

KANG, HO KWAN; KIM MIN CHEOL; 하원호; Moon Sung Wook; OH MYUNG HWAN; 김도훈

Citation

적외선 영상센서 Conference, v.10, pp.70 - 75

Keywords

MEMS; microbolometer; surface micromachining; SiNx; VOx

URI

https://pubs.kist.re.kr/handle/201004/109493

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KIST Conference Paper > Others

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