DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author박윤권-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.author박흥우-
dc.contributor.authorYoon Young Soo-
dc.contributor.authorOh Young-Jei-
dc.contributor.authorPARK JEONG HO-
dc.contributor.authorSUH SANG HEE-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.author김철주-
dc.date.accessioned2024-01-13T17:33:12Z-
dc.date.available2024-01-13T17:33:12Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109558-
dc.subjectMEMS-
dc.title.alternative비냉각 적외선 센서 제작을 위한 스퍼터링 방법에 의한 PZT 박막 형성 및 식각 특성 평가-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제 10 회 적외선 영상센서 Conference-
dc.citation.title제 10 회 적외선 영상센서 Conference-
dc.citation.conferencePlaceKO-
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