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Other Titles

비냉각 적외선 센서 제작을 위한 스퍼터링 방법에 의한 PZT 박막 형성 및 식각 특성 평가

Authors

박윤권; Ju Byeong Kwon; 박흥우; Yoon Young Soo; Oh Young-Jei; PARK JEONG HO; SUH SANG HEE; OH MYUNG HWAN; 김철주

Citation

제 10 회 적외선 영상센서 Conference

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/109558

Appears in Collections:

KIST Conference Paper > Others

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