Stress effect on interconnect reliability due to electromigration

Other Titles
반도체 배선의 electromigration 신뢰성에 미치는 stress의 영향
Authors
PARK YOUNG JOON주영창
Citation
Proc. of the Thirteenth Conference on Mechanical Behaviors of Materials, pp.83 - 92
Keywords
electromigration
URI
https://pubs.kist.re.kr/handle/201004/109562
Appears in Collections:
KIST Conference Paper > Others
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