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A study on laser direct dry etching of GaAs/AlGaAs multi-layer.

Authors

박세기; 이천; KIM EUN KYU

Citation

Proc. SPIE's Conf. on laser Application in Micro-electronic and Optoelectronic Manufacturing IV, v.v. 3618, pp.370 - 377

Keywords

Ar ion laser

URI

https://pubs.kist.re.kr/handle/201004/109777

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KIST Conference Paper > Others

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