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dc.contributor.author이덕중-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorLEE YUN HI-
dc.contributor.author정지원-
dc.contributor.author장진-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T18:34:30Z-
dc.date.available2024-01-13T18:34:30Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/110177-
dc.languageEnglish-
dc.subjectMEMS-
dc.titlePatterning 된 전극을 이용한 4 인치 Glass-to-Silicon wafer 의 정전 열 접합 .-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation물리학회회보 = Bulletin of the Korean Physical Society, v.v. 16, no.no. 1, pp.202-
dc.citation.title물리학회회보 = Bulletin of the Korean Physical Society-
dc.citation.volumev. 16-
dc.citation.numberno. 1-
dc.citation.startPage202-
dc.citation.endPage202-
dc.citation.conferencePlaceKO-
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