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Patterning 된 전극을 이용한 4 인치 Glass-to-Silicon wafer 의 정전 열 접합 .

Authors

이덕중; Ju Byeong Kwon; LEE YUN HI; 정지원; 장진; OH MYUNG HWAN

Citation

물리학회회보 = Bulletin of the Korean Physical Society, v.v. 16, no.no. 1, pp.202

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/110177

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KIST Conference Paper > Others

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