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dc.contributor.author정지원-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.author최우범-
dc.contributor.author이덕중-
dc.contributor.authorCHOI DOO JIN-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T19:01:41Z-
dc.date.available2024-01-13T19:01:41Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/110260-
dc.subjectMEMS-
dc.title.alternative실리콘과 유리접합을 이용한 FED Packaging-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제5회 한국반도체학술대회 논문집, pp.207 - 208-
dc.citation.title제5회 한국반도체학술대회 논문집-
dc.citation.startPage207-
dc.citation.endPage208-
dc.citation.conferencePlaceKO-
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